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hexafluorotungsten

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Origin: China

Cas No: 7783-82-6

Specification: 99%min

Min order Quantity: 1 /kg

Supply Ability: 80 mt/month

Lead time: 7 days for OEM, 3 days for ready goods

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CAS No.: 7783-82-6 Formula: F6W Molecular Weight: 297.83000

Description

Tungsten(VI) fluoride, also known as tungsten hexafluoride, is the inorganic compound of tungsten and fluorine with the formula WF6. This corrosive, colorless compound is a gas under standard conditions, with a density of about 13 g/L (roughly 11 times heavier than air.), WF6 is one of the heaviest known gases under standard conditions. WF6 gas is most commonly used in the production of semiconductor circuits and circuit boards through the process of chemical vapor deposition – upon decomposition, molecules of WF6 leave a residue of metallic tungsten. This layer serves as low-resistive metallic "interconnect".

Basic Info

Chemical Name	hexafluorotungsten
Synonyms	tungsten hexafluoride; PC7940; tungsten fluoride;
CAS No.	7783-82-6
Molecular Formula	F6W
Molecular Weight	297.83000
PSA	0.00000
LogP	2.52120

Properties

Appearance & Physical State	Colorless gas
Density	13.1 g/L. gas
Boiling Point	17ºC
Melting Point	2ºC
Water Solubility	decomposes
Storage Condition	Keep in a cool, dry, dark location in a tightly sealed container or cylinder. Keep away from incompatible materials, ignition sources and untrained individuals. Secure and label area. Protect containers/cylinders from physical damage.

Safety Info

RTECS	YO7720000
Hazard Class	2.3
Safety Statements	S26; S36/37/39; S45
WGK Germany	3
RIDADR	UN 2196 2
Risk Statements	R23/24/25; R34
Hazard Codes	T; C

Synthesis Route

Tungsten tetrafluoride→hexafluorotungsten+tungsten atom
Ruthenium fluoride+tungsten atom→hexafluorotungsten+ruthenium atom
difluorine+tungsten atom→hexafluorotungsten

Precursor

difluorine
tungsten atom
Antimony pentafluoride
tungsten hexachloride

Downstream Product

tungsten atom
difluorosilylene
trifluorosilicon
fluorosilicon

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